Method for manufacturing a silicon-based coriolis-force-based flow sensing device, coriolis-force-based flow sensing device, and system for measuring a property of a fluid
US-11971284-B2 · Apr 30, 2024 · US
This page is not indexed by search engines while we improve data quality.
micromachined flowmeters
micromachined flowmeters · Cooperative Patent Classification (CPC)
Computing, optics, measurement, and control technologies.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | G01F1/8445 |
| Official title | {micromachined flowmeters} |
| Display label | micromachined flowmeters |
| Total patents | 9 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is growing.
| Year | Patents |
|---|---|
| 2019 | 1 |
| 2020 | 1 |
| 2021 | 4 |
| 2023 | 1 |
| 2024 | 2 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
MEMS-based Coriolis mass flow controller
US-11860016-B2 · Jan 2, 2024 · US
MEMS coriolis gas flow controller
US-11662237-B2 · May 30, 2023 · US
Method for manufacturing a silicon-based coriolis-force-based flow sensing device, coriolis-force-based flow sensing device, and system for measuring a property of a fluid
US-2021293597-A1 · Sep 23, 2021 · US
Su-8 micro coriolis mass flow sensor
US-2021190564-A1 · Jun 24, 2021 · US
Mems coriolis gas flow controller
US-2021140807-A1 · May 13, 2021 · US
Mems-based coriolis mass flow controller
US-2021096011-A1 · Apr 1, 2021 · US
Mass flow controller for substrate processing
US-10591934-B2 · Mar 17, 2020 · US
Mass Flow Controller for Substrate Processing
US-2019279888-A1 · Sep 12, 2019 · US