Plasma generator, cleaning liquid processing apparatus, semiconductor device cleaning apparatus, cleaning liquid processing method, and method of manufacturing semiconductor device
US-11545372-B2 · Jan 3, 2023 · US
This page is not indexed by search engines while we improve data quality.
Siqing Lu patents
Siqing Lu is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Siqing Lu |
| Total patents | 2 |
| First publication | Jan 16, 2020 |
| Latest publication | Jan 3, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7618 | 2 |
| H10P72/0414 | 2 |
| H05H1/46 | 2 |
| B08B3/10 | 2 |
| B08B3/08 | 2 |