Method for supplying vaporized precursor
US-9637821-B2 · May 2, 2017 · US
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Sims James patents
Sims James is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Sims James |
| Total patents | 1 |
| First publication | May 2, 2017 |
| Latest publication | May 2, 2017 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| Y10T137/0318 | 1 |
| C23C16/4486 | 1 |
| C23C16/45589 | 1 |
| C23C16/45561 | 1 |
| C23C16/4402 | 1 |