Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method
US-9946161-B2 · Apr 17, 2018 · US
This page is not indexed by search engines while we improve data quality.
Scharnweber Ralf patents
Scharnweber Ralf is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Scharnweber Ralf |
| Total patents | 4 |
| First publication | Dec 22, 2015 |
| Latest publication | Apr 17, 2018 |
Notable patents
Publications ranked by popularity score, then publication date.
Illumination system for a microlithographic projection exposure apparatus
US-9575414-B2 · Feb 21, 2017 · US
Illumination system for a microlithographic projection exposure apparatus
US-2016077446-A1 · Mar 17, 2016 · US
Illumination system for a microlithographic projection exposure apparatus
US-9217930-B2 · Dec 22, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70058 | 3 |
| G03F7/70191 | 3 |
| G03F7/70083 | 3 |
| G03F7/70075 | 3 |
| G02B3/0056 | 3 |