Method to improve profile control during selective etching of silicon nitride spacers
US-12327732-B2 · Jun 10, 2025 · US
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Royer James patents
Royer James is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Royer James |
| Total patents | 14 |
| First publication | Sep 27, 2018 |
| Latest publication | Jun 10, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Method to improve profile control during selective etching of silicon nitride spacers
US-2024112920-A1 · Apr 4, 2024 · US
Method to improve profile control during selective etching of silicon nitride spacers
US-11837474-B2 · Dec 5, 2023 · US
Method to improve profile control during selective etching of silicon nitride spacers
US-2023026743-A1 · Jan 26, 2023 · US
Method to improve profile control during selective etching of silicon nitride spacers
US-11469110-B2 · Oct 11, 2022 · US
Iodine-containing compounds for etching semiconductor structures
US-11430663-B2 · Aug 30, 2022 · US
Method to improve profile control during selective etching of silicon nitride spacers
US-2020251346-A1 · Aug 6, 2020 · US
Iodine-containing compounds for etching semiconductor structures
US-2020203174-A1 · Jun 25, 2020 · US
Method to improve profile control during selective etching of silicon nitride spacers
US-10629451-B1 · Apr 21, 2020 · US
Iodine-containing compounds for etching semiconductor structures
US-10607850-B2 · Mar 31, 2020 · US
Recent patents
Latest publications not already listed above.
Hydrofluorocarbons containing —NH2 functional group for 3D NAND and DRAM applications
US-10410878-B2 · Sep 10, 2019 · US
Hydrofluorocarbons containing –nh2 functional group for 3d nand and dram applications
US-2019131140-A1 · May 2, 2019 · US
Gases for low damage selective silicon nitride etching
US-10217681-B1 · Feb 26, 2019 · US
Gases for low damage selective silicon nitride etching
US-2018277387-A1 · Sep 27, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Air Liquide American | 14 |
| Air Liquide Electronics Us Lp | 5 |
| Air Liquide | 4 |
| Lair Liquide Soc Pour Letude Et Lexploitation Des Procedes Georges Claude | 1 |
| Lair Liquide Sa Pour Ietude Et Iexploitaion Des Procedes Georges Claude | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P50/283 | 14 |
| H01L21/31116 | 14 |
| H10P95/08 | 7 |
| H01L21/31058 | 7 |
| H10D84/0147 | 7 |