Apparatus for analyzing and/or processing a sample with a particle beam and method
US-12586755-B2 · Mar 24, 2026 · US
This page is not indexed by search engines while we improve data quality.
Rhinow Daniel patents
Rhinow Daniel is listed as an inventor on 20 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Rhinow Daniel |
| Total patents | 20 |
| First publication | Oct 6, 2020 |
| Latest publication | Mar 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Remote-plasma electron-induced mask repair
US-2026050208-A1 · Feb 19, 2026 · US
Device, method and computer program for processing of a surface of a substrate
US-2026042123-A1 · Feb 12, 2026 · US
Method and device for mask repair
US-2026044065-A1 · Feb 12, 2026 · US
Method and apparatus for setting a side wall angle of a pattern element of a photolithographic mask
US-12535726-B2 · Jan 27, 2026 · US
Method and apparatus for mask repair
US-12535729-B2 · Jan 27, 2026 · US
Methods and devices for the contactless setting of an electrostatic charge of a sample
US-2025357065-A1 · Nov 20, 2025 · US
Method, lithography mask, use of a lithography mask, and processing arrangement
US-2025208499-A1 · Jun 26, 2025 · US
Compensation raster scanning
US-2024395492-A1 · Nov 28, 2024 · US
Apparatus for analysing and/or processing a sample with a particle beam and method
US-2024210335-A1 · Jun 27, 2024 · US
Recent patents
Latest publications not already listed above.
Method and apparatus for repairing a defect of a sample using a focused particle beam
US-2024186109-A1 · Jun 6, 2024 · US
Method and apparatus for examining a beam of charged particles
US-11961705-B2 · Apr 16, 2024 · US
End point determination by means of contrast gas
US-2023341766-A1 · Oct 26, 2023 · US
Method and apparatus for mask repair
US-2023305386-A1 · Sep 28, 2023 · US
Method and apparatus for mask repair
US-2023280647-A1 · Sep 7, 2023 · US
Apparatus for analyzing and/or processing a sample with a particle beam and method
US-2023238213-A1 · Jul 27, 2023 · US
Method and apparatus for processing a lithographic mask
US-2023113702-A1 · Apr 13, 2023 · US
Method and apparatus for setting a side wall angle of a pattern element of a photolithographic mask
US-2023109566-A1 · Apr 6, 2023 · US
Method and apparatus for examining a beam of charged particles
US-2021110996-A1 · Apr 15, 2021 · US
Functionalized nanomembrane, a method for preparation thereof and their use
US-10794908-B2 · Oct 6, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 19 |
| Hoinkis Elke | 2 |
| Johann Wolfgang Goethe Univ | 1 |
| Max Planck Gesellschaft | 1 |
| Quantifoil Micro Tools Gmbh | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F1/74 | 10 |
| H01J37/28 | 7 |
| H01J2237/31744 | 5 |
| H01J37/244 | 4 |
| G03F1/72 | 4 |