Systems and methods for detecting undesirable dynamic behavior of liquid dispensed onto a rotating substrate
US-2018337069-A1 · Nov 22, 2018 · US
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Plazonic Ante patents
Plazonic Ante is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Plazonic Ante |
| Total patents | 4 |
| First publication | Jan 26, 2016 |
| Latest publication | Nov 22, 2018 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus
US-9685358-B2 · Jun 20, 2017 · US
Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus
US-2016118278-A1 · Apr 28, 2016 · US
Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus
US-9245777-B2 · Jan 26, 2016 · US
Recent patents
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Ag | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7624 | 4 |
| H01L21/67115 | 4 |
| H10P72/0404 | 3 |
| H10P72/7626 | 3 |
| H10P72/7618 | 3 |