Ultra-low temperature ALD to form high-quality Si-containing film
US-11482414-B2 · Oct 25, 2022 · US
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Oshchepkov Ivan patents
Oshchepkov Ivan is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Oshchepkov Ivan |
| Total patents | 5 |
| First publication | Apr 25, 2017 |
| Latest publication | Oct 25, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Ultra-low temperature ald to form high-quality si-containing film
US-2020373148-A1 · Nov 26, 2020 · US
Vapor disposition of silicon-containing films using penta-substituted disilanes
US-2019027357-A1 · Jan 24, 2019 · US
Vapor deposition of silicon-containing films using penta-substituted disilanes
US-2017186597-A1 · Jun 29, 2017 · US
Vapor deposition of silicon-containing films using penta-substituted disilanes
US-9633838-B2 · Apr 25, 2017 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Air Liquide | 3 |
| L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P14/69433 | 5 |
| H10P14/6681 | 5 |
| H10P14/6336 | 5 |
| H10P14/6339 | 5 |
| C23C16/345 | 5 |