Composition, film, method of forming film, method of forming pattern, method of forming organic-underlayer-film reverse pattern, and method of producing composition
US-12516074-B2 · Jan 6, 2026 · US
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OOTSUBO Yuusuke patents
OOTSUBO Yuusuke is listed as an inventor on 9 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | OOTSUBO Yuusuke |
| Total patents | 9 |
| First publication | Oct 11, 2018 |
| Latest publication | Jan 6, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Composition, metal-containing film, metal-containing film formation method, and composition production method
US-2024279505-A1 · Aug 22, 2024 · US
Composition, film, method of forming film, method of forming pattern, method of forming organic-underlayer-film reverse pattern, and method of producing composition
US-2022204535-A1 · Jun 30, 2022 · US
Film-forming composition, resist underlayer film, method of forming film, method of forming resist pattern, method of forming organic-underlayer-film reverse pattern, method of producing film-forming composition, and method of forming metal-containing film pattern
US-2022075267-A1 · Mar 10, 2022 · US
Composition, method of producing substrate, method of forming pattern, and method of forming reverse pattern
US-2021318619-A1 · Oct 14, 2021 · US
Patterned substrate-producing method
US-2020333706-A1 · Oct 22, 2020 · US
Resist pattern-forming method and substrate-treating method
US-2020218161-A1 · Jul 9, 2020 · US
Metal-containing film-forming composition, metal-containing film and pattern-forming method
US-2020159121-A1 · May 21, 2020 · US
Composition for forming silicon-containing film for euv lithography, silicon-containing film for euv lithography, and pattern-forming method
US-2018292753-A1 · Oct 11, 2018 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Jsr Corp | 9 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/11 | 7 |
| G03F7/2004 | 6 |
| G03F7/094 | 5 |
| H10P76/00 | 4 |
| G03F7/40 | 4 |