Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
US-2024141484-A1 · May 2, 2024 · US
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Okamiya Hiroki patents
Okamiya Hiroki is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Okamiya Hiroki |
| Total patents | 5 |
| First publication | May 24, 2018 |
| Latest publication | May 2, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing apparatus and control system
US-11060190-B2 · Jul 13, 2021 · US
Substrate processing apparatus, control system, and method of manufacturing semiconductor device
US-2019301020-A1 · Oct 3, 2019 · US
Substrate processing apparatus, exhaust system and method of manufacturing semiconductor device
US-10163663-B2 · Dec 25, 2018 · US
Substrate processing apparatus, exhaust system and method of manufacturing semiconductor device
US-2018144953-A1 · May 24, 2018 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kokusai Electric Corp | 4 |
| Hitachi Int Electric Inc | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0402 | 5 |
| H10P72/3302 | 3 |
| C23C16/4412 | 3 |
| C23C16/4408 | 3 |
| H01L21/67017 | 3 |