Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same
US-11149234-B2 · Oct 19, 2021 · US
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Oh Hae Rim patents
Oh Hae Rim is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Oh Hae Rim |
| Total patents | 4 |
| First publication | Nov 22, 2018 |
| Latest publication | Oct 19, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same
US-2019241844-A1 · Aug 8, 2019 · US
Cleaning liquid supply unit, substrate treating apparatus including the same, and substrate treating method
US-2019057884-A1 · Feb 21, 2019 · US
Apparatus and method for manufacturing cleaning solution
US-2018335661-A1 · Nov 22, 2018 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Semes Co Ltd | 4 |
| Samsung Electronics Co Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0414 | 4 |
| H10P72/0402 | 4 |
| C11D3/43 | 3 |
| H01L21/67051 | 3 |
| C11D2111/22 | 3 |