Spectral feature selection and pulse timing control of a pulsed light beam
US-11768438-B2 · Sep 26, 2023 · US
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O'Brien Kevin Michael patents
O'Brien Kevin Michael is listed as an inventor on 11 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | O'Brien Kevin Michael |
| Total patents | 11 |
| First publication | Jun 22, 2017 |
| Latest publication | Sep 26, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Spectral feature selection and pulse timing control of a pulsed light beam
US-2023040812-A1 · Feb 9, 2023 · US
Spectral feature selection and pulse timing control of a pulsed light beam
US-11526083-B2 · Dec 13, 2022 · US
Online calibration for repetition rate dependent performance variables
US-11050213-B2 · Jun 29, 2021 · US
Spectral feature selection and pulse timing control of a pulsed light beam
US-2021018846-A1 · Jan 21, 2021 · US
Online calibration for repetition rate dependent performance variables
US-2020321746-A1 · Oct 8, 2020 · US
Online calibration for repetition rate dependent performance variables
US-10727642-B2 · Jul 28, 2020 · US
Lithographic apparatus and method
US-10627724-B2 · Apr 21, 2020 · US
Online calibration for repetition rate dependent performance variables
US-2018006425-A1 · Jan 4, 2018 · US
Online calibration for repetition rate dependent performance variables
US-9762023-B2 · Sep 12, 2017 · US
Recent patents
Latest publications not already listed above.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Cymer LLC | 11 |
| Asml Netherlands Bv | 7 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/7055 | 10 |
| G03F7/70041 | 10 |
| G03F7/70575 | 10 |
| H01S3/1305 | 10 |
| H01S3/137 | 8 |