Device for optimizing source mask and lithography system including the same
US-2025224664-A1 · Jul 10, 2025 · US
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Nam Sungmin patents
Nam Sungmin is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Nam Sungmin |
| Total patents | 3 |
| First publication | May 1, 2025 |
| Latest publication | Jul 10, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Method of configuring extreme ultra-violet (euv) light source and euv exposure method using the euv light source
US-2025138431-A1 · May 1, 2025 · US
Method of configuring extreme ultra-violet (euv) illumination system, and euv exposure method using the euv illumination system
US-2025138434-A1 · May 1, 2025 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70125 | 3 |
| G03F7/705 | 3 |
| G03F7/70504 | 2 |
| G06F2119/18 | 1 |
| G06F30/398 | 1 |