Apparatus for measuring radical density distribution based on light absorption and operating method thereof
US-12560532-B2 · Feb 24, 2026 · US
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Nam Sangki patents
Nam Sangki is listed as an inventor on 41 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Nam Sangki |
| Total patents | 41 |
| First publication | Apr 15, 2021 |
| Latest publication | Feb 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Plasma processing device
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Contamination prevention device for extreme ultra-violet (euv) reticle and euv exposure apparatus including the same
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Arcing detection sensor and plasma treating apparatus including the same
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Neutral beam and extreme ultraviolet light-generating device and method
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Methods of processing substrates and apparatuses thereof
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Semiconductor process device and method of monitoring semiconductor process
US-2025087509-A1 · Mar 13, 2025 · US
Semiconductor processing apparatus using plasma
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Substrate processing apparatus and method of manufacturing semiconductor device using the same
US-12183555-B2 · Dec 31, 2024 · US
Recent patents
Latest publications not already listed above.
System of semiconductor process and control method thereof
US-12125687-B2 · Oct 22, 2024 · US
Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the same
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Plasma monitoring system and method of monitoring plasma
US-2024274419-A1 · Aug 15, 2024 · US
Plasma density measurement sensor, apparatus for measuring real-time plasma density having the same, and operating method thereof
US-2024274418-A1 · Aug 15, 2024 · US
Plasma processing apparatus and method
US-2024212992-A1 · Jun 27, 2024 · US
Post baking apparatus
US-2024192604-A1 · Jun 13, 2024 · US
Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereof
US-11996275-B2 · May 28, 2024 · US
Apparatus for measuring radical density distribution based on light absorption and operating method thereof
US-2024159657-A1 · May 16, 2024 · US
Semiconductor device and method of manufacture
US-2024147698-A1 · May 2, 2024 · US
Apparatus for processing plasma and method of processing plasma and manufacturing semiconductor device using the same
US-2024128055-A1 · Apr 18, 2024 · US
Method of cleaning collector of EUV light source system
US-11940620-B2 · Mar 26, 2024 · US
Semiconductor process device
US-2024047247-A1 · Feb 8, 2024 · US
Methods of processing substrates and apparatuses thereof
US-2024038510-A1 · Feb 1, 2024 · US
Upper electrode and substrate processing apparatus including the same
US-11869751-B2 · Jan 9, 2024 · US
Substrate processing apparatus
US-2023317418-A1 · Oct 5, 2023 · US
Variable frequency and non-sinusoidal power generator using double side cooling, plasma processing apparatus including the same and method of manufacturing semiconductor device using the same
US-11705306-B2 · Jul 18, 2023 · US
Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereof
US-2023197423-A1 · Jun 22, 2023 · US
Substrate processing apparatus and method of manufacturing semiconductor device using the same
US-2023143049-A1 · May 11, 2023 · US
Plasma generator, plasma processing device, and method of manufacturing semiconductor device using the plasma processing device
US-2023117953-A1 · Apr 20, 2023 · US
Upper electrode and substrate processing apparatus including the same
US-2023123891-A1 · Apr 20, 2023 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 41 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0421 | 17 |
| H01J37/32715 | 14 |
| H01J37/32174 | 12 |
| H01J37/32642 | 10 |
| H01J2237/3341 | 9 |