Extreme ultraviolet light generation system and electronic device manufacturing method
US-11778721-B2 · Oct 3, 2023 · US
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Nakarai Hiroaki patents
Nakarai Hiroaki is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Nakarai Hiroaki |
| Total patents | 7 |
| First publication | Sep 3, 2015 |
| Latest publication | Oct 3, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Extreme ultraviolet light generation system and electronic device manufacturing method
US-2022232690-A1 · Jul 21, 2022 · US
Extreme ultraviolet light generation apparatus
US-9894743-B2 · Feb 13, 2018 · US
Extreme ultraviolet light generation apparatus
US-2016192469-A1 · Jun 30, 2016 · US
Laser chamber and discharge excitation gas laser apparatus
US-9373926-B2 · Jun 21, 2016 · US
Extreme ultraviolet light generation apparatus
US-9301379-B2 · Mar 29, 2016 · US
Laser chamber and discharge excitation gas laser apparatus
US-2015249312-A1 · Sep 3, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Gigaphoton Inc | 8 |
| Watanabe Yukio | 1 |
| Igarashi Miwa | 1 |
| Moriya Masato | 1 |
| Nakarai Hiroaki | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H05G2/0086 | 5 |
| H05G2/008 | 5 |
| G03F7/70033 | 3 |
| H05G2/00 | 3 |
| H05G2/003 | 2 |