Alignment system and extreme ultraviolet light generation system
US-9325150-B2 · Apr 26, 2016 · US
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Moriya Masato patents
Moriya Masato holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 0 |
| First publication | Jun 18, 2015 |
| Latest publication | Apr 26, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Extreme ultraviolet light generation apparatus
US-9301379-B2 · Mar 29, 2016 · US
Optical device including wavefront correction parts and beam direction parts, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus
US-9128391-B2 · Sep 8, 2015 · US
Light source apparatus and data processing method
US-2015168848-A1 · Jun 18, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Alignment system and extreme ultraviolet light generation system
US-9325150-B2 · Apr 26, 2016 · US
Extreme ultraviolet light generation apparatus
US-9301379-B2 · Mar 29, 2016 · US
Optical device including wavefront correction parts and beam direction parts, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus
US-9128391-B2 · Sep 8, 2015 · US
Light source apparatus and data processing method
US-2015168848-A1 · Jun 18, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H05G2/0086 | 3 |
| H05G2/008 | 3 |
| H01S3/005 | 2 |
| G03F7/70058 | 1 |
| H10P74/238 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 4 |
| Physics | 3 |