In situ control of ion angular distribution in a processing apparatus
US-9620335-B2 · Apr 11, 2017 · US
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Munoz Nini patents
Munoz Nini is listed as an inventor on 6 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Munoz Nini |
| Total patents | 6 |
| First publication | Jun 25, 2015 |
| Latest publication | Apr 11, 2017 |
Notable patents
Publications ranked by popularity score, then publication date.
In situ control of ion angular distribution in a processing apparatus
US-2016189935-A1 · Jun 30, 2016 · US
Apparatus and method for dynamic control of ion beam energy and angle
US-9336998-B2 · May 10, 2016 · US
In situ control of ion angular distribution in a processing apparatus
US-9293301-B2 · Mar 22, 2016 · US
Apparatus and method for dynamic control of ion beam energy and angle
US-2015325410-A1 · Nov 12, 2015 · US
In situ control of ion angular distribution in a processing apparatus
US-2015179409-A1 · Jun 25, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Varian Semiconductor Equipment | 5 |
| Varian Semiconductor Equipment Ass Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32357 | 6 |
| H01J37/32422 | 6 |
| H01J37/32532 | 4 |
| H01J37/32412 | 4 |
| H01J37/32568 | 4 |