Substrate processing apparatus and substrate processing method
US-2025308946-A1 · Oct 2, 2025 · US
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Mori Kanta patents
Mori Kanta is listed as an inventor on 8 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Mori Kanta |
| Total patents | 8 |
| First publication | Apr 14, 2022 |
| Latest publication | Oct 2, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing apparatus and cleaning method of mist guard
US-12148632-B2 · Nov 19, 2024 · US
Substrate processing apparatus
US-12051605-B2 · Jul 30, 2024 · US
Nozzle, substrate processing apparatus, and substrate processing method
US-12007692-B2 · Jun 11, 2024 · US
Substrate processing apparatus and substrate gripping device
US-2024124984-A1 · Apr 18, 2024 · US
Nozzle, substrate processing apparatus, and substrate processing method
US-2023185199-A1 · Jun 15, 2023 · US
Substrate processing apparatus and cleaning method of mist guard
US-2023001458-A1 · Jan 5, 2023 · US
Substrate processing apparatus
US-2022115249-A1 · Apr 14, 2022 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 8 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0424 | 8 |
| H10P72/0448 | 6 |
| H10P72/0414 | 6 |
| B05B7/0416 | 5 |
| G03F7/423 | 5 |