Wafer processing equipment having capacitive micro sensors
US-10923405-B2 · Feb 16, 2021 · US
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Meagley Robert Paul patents
Meagley Robert Paul is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Meagley Robert Paul |
| Total patents | 4 |
| First publication | Dec 21, 2017 |
| Latest publication | Feb 16, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Wafer processing equipment having capacitive micro sensors
US-2018374764-A1 · Dec 27, 2018 · US
Wafer processing equipment having capacitive micro sensors
US-10083883-B2 · Sep 25, 2018 · US
Wafer processing equipment having capacitive micro sensors
US-2017365531-A1 · Dec 21, 2017 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P74/207 | 4 |
| H10P74/203 | 4 |
| H10P74/27 | 4 |
| H10P72/0604 | 4 |
| H10P74/238 | 4 |