Apparatus for analyzing and/or processing a sample with a particle beam and method
US-12586755-B2 · Mar 24, 2026 · US
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Marbach Hubertus patents
Marbach Hubertus is listed as an inventor on 6 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Marbach Hubertus |
| Total patents | 6 |
| First publication | Jul 27, 2023 |
| Latest publication | Mar 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Remote-plasma electron-induced mask repair
US-2026050208-A1 · Feb 19, 2026 · US
Method and apparatus for mask repair
US-12535729-B2 · Jan 27, 2026 · US
Method, lithography mask, use of a lithography mask, and processing arrangement
US-2025208499-A1 · Jun 26, 2025 · US
Method and apparatus for mask repair
US-2023280647-A1 · Sep 7, 2023 · US
Apparatus for analyzing and/or processing a sample with a particle beam and method
US-2023238213-A1 · Jul 27, 2023 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 6 |
| Hoinkis Elke | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/28 | 4 |
| G03F1/74 | 3 |
| G03F1/72 | 3 |
| H01J37/261 | 2 |
| H01J37/244 | 2 |