Post treatment processes
US-2026018409-A1 · Jan 15, 2026 · US
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Lu Rui patents
Lu Rui is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lu Rui |
| Total patents | 14 |
| First publication | Feb 29, 2024 |
| Latest publication | Jan 15, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Low-k film coefficient of thermal expansion modulation by uv treatment
US-2025391656-A1 · Dec 25, 2025 · US
Systems and methods for depositing low-K dielectric films
US-12500080-B2 · Dec 16, 2025 · US
Lower k and higher hardness with improved plasma induced damage (pid) dielectric film deposition
US-2025369102-A1 · Dec 4, 2025 · US
Rf pulsing assisted low-k material deposition with high density
US-2025357107-A1 · Nov 20, 2025 · US
Precursor, gas mixture, and method for depositing a low k dielectric film
US-2025313950-A1 · Oct 9, 2025 · US
Dry deposition of extreme ultraviolet (euv) underlayer for lithography and patterning
US-2025253158-A1 · Aug 7, 2025 · US
Methods for forming low-k dielectric materials with reduced dielectric constant and high mechanical strength
US-2025069884-A1 · Feb 27, 2025 · US
Rf pulsing assisted low-k film deposition with high mechanical strength
US-2025054749-A1 · Feb 13, 2025 · US
Systems and methods for improving mechanical strength of low dielectric constant materials
US-2024420953-A1 · Dec 19, 2024 · US
Recent patents
Latest publications not already listed above.
Methods for forming low-k dielectric materials
US-2024363337-A1 · Oct 31, 2024 · US
Systems and methods for depositing low-k dielectric films
US-2024087881-A1 · Mar 14, 2024 · US
Systems and methods for depositing low-k dielectric films
US-2024087880-A1 · Mar 14, 2024 · US
Adhesion improvement between low-k materials and cap layers
US-2024071817-A1 · Feb 29, 2024 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 14 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P14/6336 | 12 |
| H10P14/6686 | 11 |
| H01L21/02274 | 10 |
| H10P14/6538 | 8 |
| H10P14/6682 | 8 |