Exhaust module for wafer baking apparatus and wafer processing system having the same
US-11779871-B2 · Oct 10, 2023 · US
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Lim Jong-Kill patents
Lim Jong-Kill is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lim Jong-Kill |
| Total patents | 7 |
| First publication | Jun 18, 2020 |
| Latest publication | Oct 10, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Method of heating SOC film on wafer by electromagnetic wave generator and heating apparatus using the same
US-11581187-B2 · Feb 14, 2023 · US
Method and system for managing liquid supply
US-10854484-B1 · Dec 1, 2020 · US
Photoresist dispensing module and photoresist coating system having the same
US-2020218155-A1 · Jul 9, 2020 · US
Exhaust module for wafer baking apparatus and wafer processing system having the same
US-2020197851-A1 · Jun 25, 2020 · US
Method of heating soc film on wafer and heating apparatus using the same
US-2020203151-A1 · Jun 25, 2020 · US
Track system and method of processing semiconductor wafers
US-2020194297-A1 · Jun 18, 2020 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Xia Tai Xin Semiconductor Qing Dao Ltd | 7 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/168 | 5 |
| H10P72/0448 | 4 |
| H10P72/0402 | 3 |
| H10P76/204 | 3 |
| G03F7/162 | 3 |