Directional deposition in etch chamber
US-11742212-B2 · Aug 29, 2023 · US
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Lee Wonchul patents
Lee Wonchul is listed as an inventor on 11 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lee Wonchul |
| Total patents | 11 |
| First publication | Jun 16, 2015 |
| Latest publication | Aug 29, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Directional deposition in etch chamber
US-2022028697-A1 · Jan 27, 2022 · US
Etch process with pre-etch transient conditioning
US-9607848-B2 · Mar 28, 2017 · US
Continuous plasma etch process
US-9530658-B2 · Dec 27, 2016 · US
Etch process with pre-etch transient conditioning
US-2016155645-A1 · Jun 2, 2016 · US
Etch process with pre-etch transient conditioning
US-9257296-B2 · Feb 9, 2016 · US
Etch process with pre-etch transient conditioning
US-2015380264-A1 · Dec 31, 2015 · US
Continuous plasma etch process
US-2015348792-A1 · Dec 3, 2015 · US
Etch process with pre-etch transient conditioning
US-9142417-B2 · Sep 22, 2015 · US
Continuous plasma ETCH process
US-9129902-B2 · Sep 8, 2015 · US
Recent patents
Latest publications not already listed above.
Etch with pulsed bias
US-9059116-B2 · Jun 16, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 11 |
| Jain Amit | 1 |
| Fu Qian | 1 |
| Lee Wonchul | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P50/242 | 11 |
| H01J37/32449 | 10 |
| H10P50/268 | 9 |
| H01L21/32137 | 5 |
| H01L21/3065 | 5 |