Process gas monitoring apparatus, volatilization vessel, substrate processing apparatus, and method
US-2026005040-A1 · Jan 1, 2026 · US
This page is not indexed by search engines while we improve data quality.
Lee Hakjoo patents
Lee Hakjoo is listed as an inventor on 10 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lee Hakjoo |
| Total patents | 10 |
| First publication | Feb 9, 2016 |
| Latest publication | Jan 1, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Classification device and classification method
US-2024045930-A1 · Feb 8, 2024 · US
Substrate processing method
US-2024026532-A1 · Jan 25, 2024 · US
Substrate processing method and substrate processing device
US-2024006161-A1 · Jan 4, 2024 · US
Method for seasoning a chamber
US-2023070340-A1 · Mar 9, 2023 · US
Substrate processing system
US-11530483-B2 · Dec 20, 2022 · US
Method of cleaning substrate processing apparatus
US-11488819-B2 · Nov 1, 2022 · US
Method of cleaning substrate processing apparatus
US-2020176244-A1 · Jun 4, 2020 · US
Substrate processing system
US-2019390343-A1 · Dec 26, 2019 · US
Media device and control method thereof
US-9257023-B2 · Feb 9, 2016 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asm Ip Holding Bv | 8 |
| Lg Electronics Inc | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/52 | 4 |
| C23C16/45536 | 4 |
| H01J37/32853 | 3 |
| C23C16/46 | 3 |
| H10P72/0402 | 3 |