RF sensing apparatus of plasma processing chamber and plasma processing chamber including same
US-10901007-B2 · Jan 26, 2021 · US
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Kwon Do Hoon patents
Kwon Do Hoon is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kwon Do Hoon |
| Total patents | 2 |
| First publication | Mar 5, 2020 |
| Latest publication | Jan 26, 2021 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32082 | 2 |
| H01J37/32917 | 2 |
| H01J37/32935 | 2 |
| H05H1/0012 | 2 |
| H05H1/0018 | 2 |