Substrate holder surface treatments providing corrosion resistance and wear resistance
US-2026035777-A1 · Feb 5, 2026 · US
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Kutney Michael patents
Kutney Michael is listed as an inventor on 39 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kutney Michael |
| Total patents | 39 |
| First publication | Mar 25, 2021 |
| Latest publication | Feb 5, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate measurement systems having substrate holders
US-2025334445-A1 · Oct 30, 2025 · US
Substrate holder systems
US-2025336711-A1 · Oct 30, 2025 · US
Estimation of chamber component conditions using substrate measurements
US-2025291335-A1 · Sep 18, 2025 · US
Spatial optical emission spectroscopy for etch uniformity
US-12405164-B2 · Sep 2, 2025 · US
Substrate measurement subsystem
US-2025218829-A1 · Jul 3, 2025 · US
Estimation of chamber component conditions using substrate measurements
US-12339645-B2 · Jun 24, 2025 · US
Substrate measurement subsystem
US-12283503-B2 · Apr 22, 2025 · US
Chamber component condition estimation using substrate measurements
US-12216455-B2 · Feb 4, 2025 · US
Integrated substrate measurement system to improve manufacturing process performance
US-12191176-B2 · Jan 7, 2025 · US
Recent patents
Latest publications not already listed above.
Vibration determination in substrate processing systems
US-2024393761-A1 · Nov 28, 2024 · US
Integrated substrate measurement system
US-12148647-B2 · Nov 19, 2024 · US
Integrated substrate measurement system
US-2024339347-A1 · Oct 10, 2024 · US
On-the-fly measurement of substrate structures
US-2024321649-A1 · Sep 26, 2024 · US
Adjustable achromatic collimator assembly for endpoint detection systems
US-12066639-B2 · Aug 20, 2024 · US
Methods and systems for a spectral library at a manufacturing system
US-2024128100-A1 · Apr 18, 2024 · US
Multiple reflectometry for measuring etch parameters
US-11927543-B2 · Mar 12, 2024 · US
Adjustable achromatic collimator assembly for endpoint detection systems
US-2023341699-A1 · Oct 26, 2023 · US
Integrated substrate measurement system to improve manufacturing process performance
US-2023326773-A1 · Oct 12, 2023 · US
Spatial optical emission spectroscopy for etch uniformity
US-2023258500-A1 · Aug 17, 2023 · US
Adjustable achromatic collimator assembly for endpoint detection systems
US-11719952-B2 · Aug 8, 2023 · US
Chamber component condition estimation using substrate measurements
US-2023236583-A1 · Jul 27, 2023 · US
Integrated substrate measurement system
US-2023238266-A1 · Jul 27, 2023 · US
Estimation of chamber component conditions using substrate measurements
US-2023236569-A1 · Jul 27, 2023 · US
Integrated substrate measurement system to improve manufacturing process performance
US-11688616-B2 · Jun 27, 2023 · US
Spatial optical emission spectroscopy for etch uniformity
US-11668602-B2 · Jun 6, 2023 · US
Multiple reflectometry for measuring etch parameters
US-2023168210-A1 · Jun 1, 2023 · US
Multiple reflectometry for measuring etch parameters
US-11619594-B2 · Apr 4, 2023 · US
Determining substrate profile properties using machine learning
US-2023062206-A1 · Mar 2, 2023 · US
Portion of a display panel with a graphical user interface
US-D977504-S · Feb 7, 2023 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 39 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01N21/9501 | 15 |
| G05B2219/45031 | 11 |
| H10P72/0604 | 10 |
| H10P72/0616 | 10 |
| G05B19/41875 | 10 |