Organically modified metal oxide nanoparticle, method for producing the same, EUV photoresist material, and method for producing etching mask
US-12153347-B2 · Nov 26, 2024 · US
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Kataoka Sho patents
Kataoka Sho is listed as an inventor on 8 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kataoka Sho |
| Total patents | 8 |
| First publication | Nov 5, 2020 |
| Latest publication | Nov 26, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Organically modified metal oxide nanoparticles, organically modified metal oxide nanoparticles-containing solution, organically modified metal oxide nanoparticles-containing resist composition, and resist pattern forming method
US-11747724-B2 · Sep 5, 2023 · US
Organically modified metal oxide nanoparticle, method for producing same, euv photoresist material, and method for producing etching mask
US-2022397823-A1 · Dec 15, 2022 · US
Resist composition and method of forming resist pattern
US-2022171286-A1 · Jun 2, 2022 · US
Organically modified metal oxide nanoparticles, organically modified metal oxide nanoparticles-containing solution, organically modified metal oxide nanoparticles-containing resist composition, and resist pattern forming method
US-2021191261-A1 · Jun 24, 2021 · US
Method for producing tetraalkoxysilane
US-11028106-B2 · Jun 8, 2021 · US
Organically modified metal oxide nanoparticle, method for producing the same, euv photoresist material, and method for producing etching mask
US-2021149299-A1 · May 20, 2021 · US
Method for producing tetraalkoxysilane
US-2020347082-A1 · Nov 5, 2020 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Aist | 8 |
| Tokyo Ohka Kogyo Co Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/0042 | 6 |
| G03F7/0043 | 6 |
| C07F7/003 | 5 |
| G03F7/20 | 4 |
| C07F7/00 | 3 |