Illumination system for microlithography
US-10088754-B2 · Oct 2, 2018 · US
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Hurevich Igor patents
Hurevich Igor is listed as an inventor on 6 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Hurevich Igor |
| Total patents | 6 |
| First publication | Jan 22, 2015 |
| Latest publication | Oct 2, 2018 |
Notable patents
Publications ranked by popularity score, then publication date.
Illumination system for microlithography
US-2017192361-A1 · Jul 6, 2017 · US
Illumination system for microlithography
US-9606441-B2 · Mar 28, 2017 · US
Illumination system for microlithography
US-2016161858-A1 · Jun 9, 2016 · US
Illumination system for microlithography
US-9280060-B2 · Mar 8, 2016 · US
Illumination system for microlithography
US-2015022798-A1 · Jan 22, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 6 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G02B3/0043 | 6 |
| G03F7/70058 | 6 |
| G03F7/70083 | 6 |
| G03F7/70075 | 6 |
| G03F7/70191 | 6 |