Method of manufacturing semiconductor device
US-2026071325-A1 · Mar 12, 2026 · US
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Hirano Akito patents
Hirano Akito is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Hirano Akito |
| Total patents | 14 |
| First publication | Jan 12, 2016 |
| Latest publication | Mar 12, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing method, method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus
US-12435439-B2 · Oct 7, 2025 · US
Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus
US-2024105465-A1 · Mar 28, 2024 · US
Substrate processing method, method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus
US-2023349065-A1 · Nov 2, 2023 · US
Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus
US-2023295837-A1 · Sep 21, 2023 · US
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US-10840094-B2 · Nov 17, 2020 · US
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US-2019206679-A1 · Jul 4, 2019 · US
Substrate processing method and substrate processing apparatus
US-10192735-B2 · Jan 29, 2019 · US
Method of manufacturing semiconductor device including silicon nitride layer for inhibiting excessive oxidation of polysilicon film
US-10049870-B2 · Aug 14, 2018 · US
Substrate processing method and substrate processing apparatus
US-2017338106-A1 · Nov 23, 2017 · US
Recent patents
Latest publications not already listed above.
Substrate processing method and substrate processing apparatus
US-9754780-B2 · Sep 5, 2017 · US
Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
US-2016172191-A1 · Jun 16, 2016 · US
Substrate processing method and substrate processing apparatus
US-2016086797-A1 · Mar 24, 2016 · US
Substrate processing method and substrate processing apparatus
US-9236242-B2 · Jan 12, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kokusai Electric Corp | 8 |
| Hitachi Int Electric Inc | 6 |
| Kioxia Corp | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10D64/035 | 7 |
| H10P14/24 | 7 |
| H01L21/28273 | 6 |
| H10P14/3411 | 6 |
| H10P14/6319 | 5 |