Electrostatic chuck and method of making same
US-10497598-B2 · Dec 3, 2019 · US
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Hanagan Michael patents
Hanagan Michael is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Hanagan Michael |
| Total patents | 2 |
| First publication | Nov 17, 2016 |
| Latest publication | Dec 3, 2019 |
Notable patents
Publications ranked by popularity score, then publication date.
Electrostatic Chuck and Method of Making Same
US-2016336210-A1 · Nov 17, 2016 · US
Recent patents
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Entegris Inc | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0602 | 2 |
| H10P72/72 | 2 |
| H10P72/722 | 2 |
| H01L21/6833 | 2 |
| H01L21/67248 | 2 |