Method for producing a reflective optical element for EUV-lithography
US-9733580-B2 · Aug 15, 2017 · US
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Gleeson Michael patents
Gleeson Michael is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Gleeson Michael |
| Total patents | 1 |
| First publication | Aug 15, 2017 |
| Latest publication | Aug 15, 2017 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C14/542 | 1 |
| G02B5/0875 | 1 |
| B82Y10/00 | 1 |
| G21K1/062 | 1 |
| G02B5/0891 | 1 |