Methods for extending mwbc in semiconductor processing chambers
US-2025323028-A1 · Oct 16, 2025 · US
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Gao Xingyao patents
Gao Xingyao is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Gao Xingyao |
| Total patents | 14 |
| First publication | Oct 12, 2023 |
| Latest publication | Oct 16, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Methods for improving throughput and gapfill quality for metal deposition
US-2025320603-A1 · Oct 16, 2025 · US
Self field-suppression CVD tungsten (W) fill on PVD W liner
US-12406884-B2 · Sep 2, 2025 · US
Metal oxide preclean for bottom-up gapfill in MEOL and BEOL
US-12394619-B2 · Aug 19, 2025 · US
One chamber multi-station selective metal removal
US-12374568-B2 · Jul 29, 2025 · US
Methods for forming metal gapfill with low resistivity
US-12272659-B2 · Apr 8, 2025 · US
One chamber multi-station selective metal removal
US-2025079199-A1 · Mar 6, 2025 · US
Metal oxide preclean for bottom-up gapfill in meol and beol
US-2024420947-A1 · Dec 19, 2024 · US
Buffer Layer for Dielectric Protection in Physical Vapor Deposition Metal Liner Applications
US-2024145300-A1 · May 2, 2024 · US
Integrated pvd tungsten liner and seamless cvd tungsten fill
US-2024087955-A1 · Mar 14, 2024 · US
Recent patents
Latest publications not already listed above.
Methods for forming metal gapfill with low resistivity
US-2024088071-A1 · Mar 14, 2024 · US
Nitrogen plasma treatment for bottom-up growth
US-2024014072-A1 · Jan 11, 2024 · US
Treatment of tungsten surface for tungsten gap-fill
US-2023420295-A1 · Dec 28, 2023 · US
Self field-suppression cvd tungsten (w) fill on pvd w liner
US-2023326791-A1 · Oct 12, 2023 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 14 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10W20/045 | 7 |
| H10P14/44 | 6 |
| H10P14/43 | 6 |
| H10W20/033 | 5 |
| C23C16/045 | 5 |