Method of displaying substrate arrangement data, method of manufacturing semiconductor device, non-transitory computer-readable recording mendium and substrate processing apparatus
US-2023238263-A1 · Jul 27, 2023 · US
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Funakura Mitsuru patents
Funakura Mitsuru is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Funakura Mitsuru |
| Total patents | 3 |
| First publication | Jan 1, 2015 |
| Latest publication | Jul 27, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing apparatus for managing transfer state of substrate gas storage container based on supply flow rate
US-9960065-B2 · May 1, 2018 · US
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
US-2015000591-A1 · Jan 1, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Hitachi Int Electric Inc | 2 |
| Kokusai Electric Corp | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/3408 | 2 |
| H10P72/3404 | 2 |
| H10P72/0616 | 2 |
| H10P72/0604 | 2 |
| H10P72/1926 | 2 |