Systems and methods for buffer gas flow stabilization in a laser produced plasma light source
US-9516730-B2 · Dec 6, 2016 · US
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Fleurov Vladimir B patents
Fleurov Vladimir B is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Fleurov Vladimir B |
| Total patents | 7 |
| First publication | Apr 7, 2015 |
| Latest publication | Dec 6, 2016 |
Notable patents
Publications ranked by popularity score, then publication date.
Methods and apparatus for laser produced plasma EUV light source
US-9271381-B2 · Feb 23, 2016 · US
Beam position control for an extreme ultraviolet light source
US-9167679-B2 · Oct 20, 2015 · US
Beam position control for an extreme ultraviolet light source
US-2015257246-A1 · Sep 10, 2015 · US
Methods and apparatus for laser produced plasma euv light source
US-2015230325-A1 · Aug 13, 2015 · US
Systems and methods for optics cleaning in an EUV light source
US-9000404-B2 · Apr 7, 2015 · US
Beam position control for an extreme ultraviolet light source
US-9000405-B2 · Apr 7, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 6 |
| Cymer LLC | 3 |
| Fleurov Vladimir B | 1 |
| Partlo William N | 1 |
| Fomenkov Igor V | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H05G2/008 | 7 |
| H05G2/0086 | 4 |
| G21K5/10 | 3 |
| G21K5/00 | 3 |
| H05G2/005 | 2 |