Reducing speckle in an excimer light source
US-11686951-B2 · Jun 27, 2023 · US
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Everts Frank patents
Everts Frank is listed as an inventor on 18 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Everts Frank |
| Total patents | 18 |
| First publication | Mar 10, 2016 |
| Latest publication | Jun 27, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Control system and method
US-11287743-B2 · Mar 29, 2022 · US
Reducing speckle in an excimer light source
US-2021239998-A1 · Aug 5, 2021 · US
Reducing speckle in an excimer light source
US-11054665-B2 · Jul 6, 2021 · US
Online calibration for repetition rate dependent performance variables
US-11050213-B2 · Jun 29, 2021 · US
Control System and Method
US-2020401050-A1 · Dec 24, 2020 · US
Online calibration for repetition rate dependent performance variables
US-2020321746-A1 · Oct 8, 2020 · US
Online calibration for repetition rate dependent performance variables
US-10727642-B2 · Jul 28, 2020 · US
Lithographic apparatus and method
US-10627724-B2 · Apr 21, 2020 · US
Reducing speckle in an excimer light source
US-2019324286-A1 · Oct 24, 2019 · US
Recent patents
Latest publications not already listed above.
Reducing speckle in an excimer light source
US-10451890-B2 · Oct 22, 2019 · US
Lithographic apparatus and method
US-2018253014-A1 · Sep 6, 2018 · US
Reducing speckle in an excimer light source
US-2018203248-A1 · Jul 19, 2018 · US
Online calibration for repetition rate dependent performance variables
US-2018006425-A1 · Jan 4, 2018 · US
Online calibration for repetition rate dependent performance variables
US-9762023-B2 · Sep 12, 2017 · US
Online calibration for repetition rate dependent performance variables
US-2017179677-A1 · Jun 22, 2017 · US
Method of controlling a radiation source and lithographic apparatus comprising the radiation source
US-9645510-B2 · May 9, 2017 · US
Method of controlling a radiation source and lithographic apparatus comprising the radiation source
US-2016070179-A1 · Mar 10, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 18 |
| Cymer LLC | 14 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70041 | 14 |
| G03F7/70558 | 12 |
| H01S3/225 | 12 |
| G03F7/70025 | 12 |
| G03F7/7055 | 12 |