Apparatus and method for cleaning wafer handling equipment
US-11524319-B2 · Dec 13, 2022 · US
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Estrin Val patents
Estrin Val is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Estrin Val |
| Total patents | 2 |
| First publication | Jan 25, 2018 |
| Latest publication | Dec 13, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus and Method for Cleaning Wafer Handling Equipment
US-2018021818-A1 · Jan 25, 2018 · US
Recent patents
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Tencor Corp | 2 |
| Kla Corp | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7611 | 2 |
| H10P72/3408 | 2 |
| H10P72/3404 | 2 |
| H10P72/0432 | 2 |
| H10P72/50 | 2 |