Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check
US-2025293063-A1 · Sep 18, 2025 · US
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Emerson Mark E patents
Emerson Mark E is listed as an inventor on 13 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Emerson Mark E |
| Total patents | 13 |
| First publication | Oct 26, 2017 |
| Latest publication | Sep 18, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check
US-12341040-B2 · Jun 24, 2025 · US
Fixture for automatic calibration of substrate transfer robot
US-12168301-B2 · Dec 17, 2024 · US
Distance measurement between gas distribution device and substrate support at high temperatures
US-12050112-B2 · Jul 30, 2024 · US
Distance measurement between gas distribution device and substrate support at high temperatures
US-2022364858-A1 · Nov 17, 2022 · US
Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check
US-2022254666-A1 · Aug 11, 2022 · US
Distance measurement between gas distribution device and substrate support at high temperatures
US-11408734-B2 · Aug 9, 2022 · US
Fixture for automatic calibration of substrate transfer robot
US-2022134568-A1 · May 5, 2022 · US
Apparatus for measuring condition of electroplating cell components and associated methods
US-10989747-B2 · Apr 27, 2021 · US
Distance measurement between gas distribution device and substrate support at high temperatures
US-2020217657-A1 · Jul 9, 2020 · US
Recent patents
Latest publications not already listed above.
Apparatus for Measuring Condition of Electroplating Cell Components and Associated Methods
US-2020011914-A1 · Jan 9, 2020 · US
Apparatus for measuring condition of electroplating cell components and associated methods
US-10436829-B2 · Oct 8, 2019 · US
Apparatus for Measuring Condition of Electroplating Cell Components and Associated Methods
US-2017307554-A1 · Oct 26, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 13 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01B11/02 | 6 |
| H10P72/0606 | 5 |
| H10P72/53 | 5 |
| B25J9/1692 | 5 |
| B25J11/0095 | 5 |