Exposure apparatus, and device manufacturing method
US-10191388-B2 · Jan 29, 2019 · US
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Ebihara Akimitsu patents
Ebihara Akimitsu is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ebihara Akimitsu |
| Total patents | 14 |
| First publication | Feb 10, 2015 |
| Latest publication | Jan 29, 2019 |
Notable patents
Publications ranked by popularity score, then publication date.
Exposure apparatus, and device manufacturing method
US-2018299788-A1 · Oct 18, 2018 · US
Exposure apparatus and device manufacturing method
US-10007188-B2 · Jun 26, 2018 · US
Exposure apparatus and device manufacturing method
US-2018039185-A1 · Feb 8, 2018 · US
Exposure apparatus and device manufacturing method
US-9810995-B2 · Nov 7, 2017 · US
Exposure apparatus and device manufacturing method
US-2017123326-A1 · May 4, 2017 · US
Exposure apparatus and device manufacturing method
US-9551943-B2 · Jan 24, 2017 · US
Exposure apparatus and device manufacturing method
US-2016202617-A1 · Jul 14, 2016 · US
Exposure apparatus and device manufacturing method
US-9274437-B2 · Mar 1, 2016 · US
Exposure apparatus and device manufacturing method
US-2015198897-A1 · Jul 16, 2015 · US
Recent patents
Latest publications not already listed above.
Exposure apparatus, and device manufacturing method
US-9025129-B2 · May 5, 2015 · US
Exposure apparatus and device manufacturing method
US-9019473-B2 · Apr 28, 2015 · US
Exposure apparatus and device manufacturing method
US-9001307-B2 · Apr 7, 2015 · US
Exposure apparatus and making method thereof
US-8953148-B2 · Feb 10, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Nikon Corp | 13 |
| Nippon Kogaku Kk | 1 |
| Ebihara Akimitsu | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70225 | 13 |
| G03F7/70341 | 13 |
| G03F7/70725 | 13 |
| B82Y10/00 | 13 |
| G03F7/70333 | 13 |