Apparatus for processing a wafer-shaped article
US-12538752-B2 · Jan 27, 2026 · US
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Duller Michael patents
Duller Michael is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Duller Michael |
| Total patents | 2 |
| First publication | Sep 21, 2023 |
| Latest publication | Jan 27, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus for processing a wafer-shaped article
US-2023298928-A1 · Sep 21, 2023 · US
Recent patents
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Ag | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0441 | 2 |
| H10P72/7608 | 2 |
| H10P72/0424 | 2 |
| H01L21/68728 | 2 |
| H01L21/67126 | 2 |