Ion extraction optics with dynamic extraction angle control
US-2025391633-A1 · Dec 25, 2025 · US
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Distaso Daniel patents
Distaso Daniel is listed as an inventor on 16 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Distaso Daniel |
| Total patents | 16 |
| First publication | Aug 25, 2015 |
| Latest publication | Dec 25, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
In-situ ion beam angle measurement
US-2025069850-A1 · Feb 27, 2025 · US
Methods for variable etch depths
US-11456205-B2 · Sep 27, 2022 · US
Methods for variable etch depths
US-2021351069-A1 · Nov 11, 2021 · US
Substrate support with electrically floating power supply
US-10904996-B2 · Jan 26, 2021 · US
Negative ribbon ion beams from pulsed plasmas
US-10290470-B2 · May 14, 2019 · US
Substrate support with electrically floating power supply
US-2019090338-A1 · Mar 21, 2019 · US
Selective processing of a workpiece
US-10081861-B2 · Sep 25, 2018 · US
Negative Ribbon Ion Beams from Pulsed Plasmas
US-2017309454-A1 · Oct 26, 2017 · US
Negative ribbon ion beams from pulsed plasmas
US-9734991-B2 · Aug 15, 2017 · US
Recent patents
Latest publications not already listed above.
Negative Ribbon Ion Beams from Pulsed Plasmas
US-2017032937-A1 · Feb 2, 2017 · US
Selective Processing Of A Workpiece
US-2016298229-A1 · Oct 13, 2016 · US
Apparatus and method for dynamic control of ion beam energy and angle
US-9336998-B2 · May 10, 2016 · US
Workpiece Processing Method And Apparatus
US-2016111254-A1 · Apr 21, 2016 · US
Apparatus and method for dynamic control of ion beam energy and angle
US-2015325410-A1 · Nov 12, 2015 · US
Techniques for treating sidewalls of patterned structures using angled ion treatment
US-9118001-B2 · Aug 25, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Varian Semiconductor Equipment Ass Inc | 6 |
| Applied Materials Inc | 6 |
| Varian Semiconductor Equipment | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32422 | 7 |
| H01J2237/31701 | 6 |
| H01J37/32146 | 6 |
| H01J37/08 | 5 |
| H01J27/028 | 4 |