Support apparatus, a lithographic apparatus and a device manufacturing method
US-2020142317-A1 · May 7, 2020 · US
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De Jong Robert patents
De Jong Robert is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | De Jong Robert |
| Total patents | 5 |
| First publication | Apr 23, 2015 |
| Latest publication | May 7, 2020 |
Notable patents
Publications ranked by popularity score, then publication date.
Support apparatus, lithographic apparatus and device manufacturing method
US-2018231897-A1 · Aug 16, 2018 · US
Method of controlling a radiation source and lithographic apparatus comprising the radiation source
US-9645510-B2 · May 9, 2017 · US
Method of controlling a radiation source and lithographic apparatus comprising the radiation source
US-2016070179-A1 · Mar 10, 2016 · US
Support apparatus, lithographic apparatus and device manufacturing method
US-2015109599-A1 · Apr 23, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 5 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70341 | 3 |
| G03F7/70858 | 3 |
| G03F7/707 | 3 |
| G03F7/70558 | 2 |
| H01S3/225 | 2 |