Atomic layer deposition head
US-9783888-B2 · Oct 10, 2017 · US
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Dalberth Mark J patents
Dalberth Mark J is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Dalberth Mark J |
| Total patents | 4 |
| First publication | Oct 1, 2015 |
| Latest publication | Oct 10, 2017 |
Notable patents
Publications ranked by popularity score, then publication date.
Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range
US-9567670-B2 · Feb 14, 2017 · US
Atomic Layer Deposition Head
US-2016115596-A1 · Apr 28, 2016 · US
Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range
US-2015275363-A1 · Oct 1, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Ultratech Inc | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/45574 | 4 |
| C23C16/45544 | 4 |
| C23C16/453 | 4 |
| C23C16/45557 | 4 |
| C23C16/4584 | 4 |