Heat treatment apparatus
US-2025370345-A1 · Dec 4, 2025 · US
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Cho Chulmin patents
Cho Chulmin is listed as an inventor on 9 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Cho Chulmin |
| Total patents | 9 |
| First publication | Aug 13, 2020 |
| Latest publication | Dec 4, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Developer supply equipment
US-2025328078-A1 · Oct 23, 2025 · US
Spin coating apparatus
US-2025155814-A1 · May 15, 2025 · US
Extreme ultraviolet source cleaning apparatus, euv source cleaning method using the same, and substrate processing method including the same
US-2025076775-A1 · Mar 6, 2025 · US
Substrate supporting member and substrate processing apparatus including the same
US-2025031281-A1 · Jan 23, 2025 · US
Semiconductor process apparatus
US-2025028257-A1 · Jan 23, 2025 · US
Substrate processing method and substrate processing apparatus using the same
US-2025021025-A1 · Jan 16, 2025 · US
Heating plate and substrate processing apparatus including the same
US-2024155741-A1 · May 9, 2024 · US
Heating module and semiconductor fabricating system including the same
US-2020260534-A1 · Aug 13, 2020 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 9 |
| Seoul Nat Univ R&Db Foundation | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/38 | 3 |
| G03F7/168 | 3 |
| H10P72/0432 | 3 |
| G03F7/70033 | 3 |
| H10P72/0448 | 3 |