Fabrication of a silicon structure and deep silicon etch with profile control
US-9865472-B2 · Jan 9, 2018 · US
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Chen Wan-Lin patents
Chen Wan-Lin is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Chen Wan-Lin |
| Total patents | 3 |
| First publication | May 3, 2016 |
| Latest publication | Jan 9, 2018 |
Notable patents
Publications ranked by popularity score, then publication date.
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 3 |
| Chebi Robert | 1 |
| Lin Frank | 1 |
| Winniczek Jaroslaw W | 1 |
| Chen Wan-Lin | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P70/20 | 3 |
| H10P50/287 | 3 |
| H10P50/283 | 3 |
| H10P50/268 | 3 |
| H10P50/267 | 3 |