Surface treatment enabling super-conformal metal cap profile on middle of-line (mol) silicides
US-2025112091-A1 · Apr 3, 2025 · US
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Chen Shihchung patents
Chen Shihchung is listed as an inventor on 8 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Chen Shihchung |
| Total patents | 8 |
| First publication | Aug 24, 2021 |
| Latest publication | Apr 3, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Selective bottom-up metal fill/cap on junction silicide by selective metal removal
US-2025054812-A1 · Feb 13, 2025 · US
Selective metal capping processes for a junction silicide
US-2025054767-A1 · Feb 13, 2025 · US
Methods for forming low resistivity contacts
US-2024379363-A1 · Nov 14, 2024 · US
Gradient oxidation and etch for pvd metal as bottom liner in bottom up gap fill
US-2023343643-A1 · Oct 26, 2023 · US
Apparatus and methods for gas phase particle reduction
US-2022064785-A1 · Mar 3, 2022 · US
Methods for gapfill in substrates
US-2021287900-A1 · Sep 16, 2021 · US
Methods for gapfill in substrates
US-11101128-B1 · Aug 24, 2021 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 8 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10W20/057 | 4 |
| H10W20/056 | 4 |
| H10W20/033 | 4 |
| H10W20/066 | 3 |
| H10P14/432 | 3 |