Composition for tungsten CMP
US-12473457-B2 · Nov 18, 2025 · US
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Carnes Matthew E patents
Carnes Matthew E is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Carnes Matthew E |
| Total patents | 5 |
| First publication | Mar 21, 2019 |
| Latest publication | Nov 18, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Method to increase barrier film removal rate in bulk tungsten slurry
US-11597854-B2 · Mar 7, 2023 · US
Method to increase barrier film removal rate in bulk tungsten slurry
US-2021017421-A1 · Jan 21, 2021 · US
Tungsten bulk polishing method with improved topography
US-2019211228-A1 · Jul 11, 2019 · US
Composition for tungsten cmp
US-2019085209-A1 · Mar 21, 2019 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Cabot Microelectronics Corp | 5 |
| Cmc Mat Llc | 1 |
| Cmc Mat Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P52/403 | 5 |
| C09G1/02 | 5 |
| H10P52/402 | 4 |
| C23F3/06 | 4 |
| C09K3/1463 | 4 |