Extreme ultraviolet (EUV) lithography using an intervening layer or a multi-layer stack with varying mean free paths for secondary electron generation
US-12372872-B2 · Jul 29, 2025 · US
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Blachut Gregory patents
Blachut Gregory is listed as an inventor on 17 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Blachut Gregory |
| Total patents | 17 |
| First publication | Aug 24, 2017 |
| Latest publication | Jul 29, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Stimulus responsive polymer films and formulations
US-12322588-B2 · Jun 3, 2025 · US
Methods and formulations for sacrificial bracing, surface protection, and queue-time management using stimulus responsive polymers
US-2025132195-A1 · Apr 24, 2025 · US
Temporary capping material for oxide prevention in low temperature direct metal-metal bonding
US-2024312778-A1 · Sep 19, 2024 · US
Controlled degradation of a stimuli-responsive polymer film
US-11862473-B2 · Jan 2, 2024 · US
Low ceiling temperature homopolymers as sacrificial protection layers for environmentally sensitive substrates
US-2023295412-A1 · Sep 21, 2023 · US
Residue-free removal of stimulus responsive polymers from substrates
US-2023207305-A1 · Jun 29, 2023 · US
Removable cvd polymer film for surface protection and queue period extension
US-2023178364-A1 · Jun 8, 2023 · US
Controlled degradation of a stimuli-responsive polymer film
US-2023136036-A1 · May 4, 2023 · US
Small molecule films for sacrificial bracing, surface protection, and queue-time management
US-2022328338-A1 · Oct 13, 2022 · US
Recent patents
Latest publications not already listed above.
Stimulus responsive polymer films and formulations
US-2022301859-A1 · Sep 22, 2022 · US
Extreme ultraviolet (euv) lithography using an intervening layer or a multi-layer stack with varying mean free paths for secondary electron generation
US-2022197147-A1 · Jun 23, 2022 · US
In situ vapor deposition polymerization to form polymers as precursors to viscoelastic fluids for particle removal from substrates
US-11065654-B2 · Jul 20, 2021 · US
Polymer brush reflow for directed self-assembly of block copolymer thin films
US-11008481-B1 · May 18, 2021 · US
Block polymers for sub-10 nm patterning
US-10239982-B2 · Mar 26, 2019 · US
In situ vapor deposition polymerization to form polymers as precursors to viscoelastic fluids for particle removal from substrates
US-2019015878-A1 · Jan 17, 2019 · US
Block Polymers for Sub-10 NM Patterning
US-2017240681-A1 · Aug 24, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 14 |
| Univ Texas | 3 |
| Univ California | 1 |
| Seagate Technology Llc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P14/683 | 8 |
| H10P14/6334 | 6 |
| H10P70/20 | 6 |
| H01L21/02118 | 5 |
| H01L21/02271 | 5 |