Method and apparatus for supplying mixed gas
US-9533268-B2 · Jan 3, 2017 · US
This page is not indexed by search engines while we improve data quality.
BIRO Tomoya patents
BIRO Tomoya is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | BIRO Tomoya |
| Total patents | 4 |
| First publication | Jan 22, 2015 |
| Latest publication | Jan 3, 2017 |
Notable patents
Publications ranked by popularity score, then publication date.
Dividing method for wafer
US-9159622-B2 · Oct 13, 2015 · US
Dividing method for wafer
US-2015044857-A1 · Feb 12, 2015 · US
Method and apparatus for supplying mixed gas
US-2015020890-A1 · Jan 22, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Iwatani Corp | 4 |
| Disco Corp | 2 |
| Central Glass Co Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P70/30 | 2 |
| H10P50/242 | 2 |
| H10P34/422 | 2 |
| H10P54/00 | 2 |
| H01L21/3065 | 2 |