Substrate handling systems and methods for CMP processing
US-12454036-B2 · Oct 28, 2025 · US
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Balakumar Manoj patents
Balakumar Manoj is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Balakumar Manoj |
| Total patents | 4 |
| First publication | Jan 20, 2022 |
| Latest publication | Oct 28, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Methods of detecting non-conforming substrate processing events during chemical mechanical polishing
US-12036635-B2 · Jul 16, 2024 · US
Substrate handling systems and methods for cmp processing
US-2022072682-A1 · Mar 10, 2022 · US
Methods of detecting non-conforming substrate processing events during chemical mechanical polishing
US-2022016739-A1 · Jan 20, 2022 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| B24B37/042 | 4 |
| B24B37/005 | 4 |
| H10P90/126 | 2 |
| H10P90/124 | 2 |
| H10P90/123 | 2 |