Depositing a carbon hardmask by high power pulsed low frequency rf
US-2024234091-A9 · Jul 11, 2024 · US
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Bai Rujun patents
Bai Rujun is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Bai Rujun |
| Total patents | 4 |
| First publication | Jul 7, 2022 |
| Latest publication | Jul 11, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Depositing a carbon hardmask by high power pulsed low frequency rf
US-2024136153-A1 · Apr 25, 2024 · US
Depositing a carbon hardmask by high power pulsed low frequency RF
US-11837441-B2 · Dec 5, 2023 · US
High selectivity, low stress, and low hydrogen diamond-like carbon hardmasks by high power pulsed low frequency rf
US-2022216037-A1 · Jul 7, 2022 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P76/202 | 4 |
| H10P50/73 | 4 |
| H10P50/71 | 4 |
| H10P14/6336 | 4 |
| H10P76/405 | 4 |